Feasibility study of wide-angle incidence X-ray waveguides using surface diffraction

Department of Physics, National Tsing Hua University* Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan, R.O.C.**
â—‹Sung-Yu Chen* Chia-Hung Chu* Chien-Liang Chen* Po-Wei Wu* Mou-Sen Chiu* Yu-Chi Shen* M.-H. Hong** Shih-Lin Chang*

Grazing incidence X-ray waveguides have been most studied because of its simple geometry and applicability for all photon energies. However, wide-angle incidence waveguides are also essential for modern X-ray optics, as far as coupling/guiding X-ray beams into a given direction are concerned. In order to investigate the possibility of making wide-angle incidence waveguides for hard X-rays, we prepare waveguides on silicon (001) wafers by using X-ray lithographic technique. The shapes of the waveguides are 150μm high and 2cm long with different widths ranging from 5 to 100μm and the distance between the adjacent waveguides is 3mm. The silicon waveguides are plated with gold on top and by sides. The X-ray wide-angle incidence Bragg surface (113) diffraction from the (001) silicon using synchrotron radiation at 8.878keV clearly shows the guiding and preserving effects of X-rays inside the 1.5 dimensional waveguides. Details of this investigation will be discussed.